Nanoelectronics refer to the use of nanotechnology in electronic elements. The term covers a other set of devices and materials, with the common characteristic that they're thus tiny that inter-atomic interactions and quantum mechanical properties have to studied extensively.
Nano-metrology is subfield of metrology. Nano-metrology has a crucial role in order to produce nano-materials & devices with a high degree of accuracy in nanomanufacturing. A challenge in this field is to develop or produce new measurement techniques and standards to fulfil the needs of next-generation advanced producing.